Precision Patterning of PDMS Thin Films: A New Fabrication Method and Its Applications

摘要

We present a novel fabrication method for patterning PDMS thin films on solid surfaces. The method allows microstructures with precise lateral dimensions and heights to be formed using PDMS. We have applied this technology to form microfluidic channel units, reaction chambers, and micro elastic gaskets. This new fabrication method could potentially give rise to an efficient and reliable approach of constructing microfluidic systems.