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PDMS PDMS PDMS thin film having a lattice patterning structure for improving radiative cooling effect and method for producing the PDMS thin film

机译:具有改善辐射冷却效果的晶格图案结构的PDMS PDMS PDMS薄膜及其制造方法

摘要

The present invention provides a PDMS thin film having a lattice patterning structure for enhancing a radiation cooling effect, and a method of manufacturing the PDMS thin film. The method includes the steps of: attaching a PET substrate on a first base substrate; depositing a PR photoresist on the PET substrate through spin coating and patterning the PR photoresist; forming an upper PDMS assembly by spin coating PDMS on the patterned PR photoresist; depositing an Ag forming layer on a second base substrate and spin coating PDMS on the Ag forming layer to form a lower PDMS assembly; combining the upper PDMS assembly and the lower PDMS assembly to complete one integrated final PDMS assembly; and removing the PET substrate at the same time as removing the PR photoresist on the final PDMS assembly.
机译:本发明提供了具有用于增强辐射冷却效果的晶格图案结构的PDMS薄膜,以及制造PDMS薄膜的方法。该方法包括以下步骤:在第一基础基板上附着PET基板;通过旋涂将PR光致抗蚀剂沉积在PET基板上并图案化PR光致抗蚀剂;通过在图案化的PR光刻胶上旋涂PDMS来形成上PDMS组件;在第二基础基板上沉积Ag形成层,并在Ag形成层上旋涂PDMS以形成下部PDMS组件;将上部PDMS组件和下部PDMS组件组合在一起,以完成一个集成的最终PDMS组件;在去除最终PDMS组件上的PR光刻胶的同时去除PET基板。

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