DEVELOPMENT OF NANO-PRECISION SYNERGISTIC FINISHING PROCESS INTEGRATED ELID-GRINDING AND MRF

摘要

Owing to lower removal rate of MRF for ultra-hard material, MRF is time-consumable and low efficiency for polishing a rough optical surface. Its pre-finished surfaces should have better figure accuracy and better surface roughness; ELID grinding may meet those needs, so ELID is the best alternative and can decrease finishing time. ELID grinding was conducted before MRF. By applying the ultra-precision synergistic finishing process of ELID grinding and MRF, surface accuracy of the λ/10～ λ/20 nm peak-to-valley and surface micro-roughness less than 10 Angstrom for glass lens were produced in high efficiency. The synergistic technologies may shorten largely finishing time and eliminate the industry's reliance on the specialized skillsrnrequired to operate today's costly and labor-intensive conventional manufacturing processes. Furthermore, extend the manufacturing state-of-the-art and provide optical manufacturers with the cost effective capability to produce optical elements.