DEVELOPMENT OF MECHANISMS AND FRAME STRUCTURES FOR A LABORATORY-SCALE COMPACT SOFT X-RAY MICROSCOPY

摘要

X-ray microscopy can fill the gap between optical microscopy (OM) and electron microscopy (EM). It uses the X-ray of which the wavelength lies from several nanometers to sub-nm. It makes the image resolution of X-ray microscopy much higher than OM. Recent research on micro-zoneplate for the objective of X-ray microscopy makes the X-ray image resolution even similar to that of EM. X-ray microscopy can observe the samples thick up to 10μm while EM can do for only 1μm thick samples. Especially, the interaction of soft X-ray is highly related to the atomic composition of samples therefore X-ray microscopy can be used widely from biology to industry. Most of researches on X-ray microscopy used synchrotron as the X-ray source. Recently, however, rather compact X-ray sources are being used for X-ray microscopic imaging. Compact X-ray source usually has its X-ray intensity much weaker than synchrotron therefore the alignment and vibration of optical components should be one of the most important design criteria. In this paper, the mechanisms and frame structures for a laboratory-scale compact soft X-ray microscopy is presented.