Soft X-ray Microscopy of Higher Harmonic Soft X-ray Light Sources and Method of Fabricating Phase Inversion Zone Plates

摘要

PURPOSE: By controlling the energy and chirp of laser the ream X-ray microscope of the ultraharmonic ream radiation light source and manufacturing method of the topological inversion zone plate used in the same obtain the excellent ultraharmonic through the vapor reaction. CONSTITUTION: The ultraharmonic ream x-ray generator(100) occurs the ultraharmonic ream X-rays through the interaction of the gas atom and high power femtosecond laser beam. The X-rays mirror(200) focuses the ultraharmonic ream X-rays created in the ultraharmonic ream x-ray generator. The ultraharmonic ream X-rays reflected to from the X-rays mirror is researched in the sample(300).