Perovskite High Dielectrics for Frequency Agile Application

摘要

Barium strontium titanate (BST) thin films on Pt/Ti/SiO_2/Si substrate were fabricated for frequency tunable applications by chemical solution precursors. The structure and surface morphology were characterized by XRD and SEM. A small signal electrical measurement on HP-4284A shows that dielectric constant and loss tangent at zero electrical field for post annealing in O_2 atmosphere are around 300 and 0.01 at 100 kHz, respectively. The dielectric properties could be changed by DC bias electric filed and the tunability is found less than 20% with the most stringent specification for viable loss tangent.