Deep-UV Transparent Conductive ss-Ga_2O_3 Film

摘要

Deep ultraviolet transparent and electrical conductive β-Ga_2O_3 film was prepared on SiO_2 glass substrate. The film had electric conductivity of 1 Scm~(-1), carrier density of 1.4 x 10~(19)cm~(-3) and mobility of 0.44 cni~2V~(-1)s~(-1). Internal transmittance at wavelength of 248 nm exceeded 50%. Conductivity was enhanced at an oxygen pressure less than 10~(-4) Pa, and transparency appeared at a substrate temperature over 800℃.