Two-view small-angle wedge sample preparation by hand tools for transmission electron microscopy of semiconductors and related materials

摘要

Various semall-angle wedge two-view samples have been prepared by a small-angle cleavage technique using hand tools and examined by transmission electron microscopy. Cleaved wedges from the same material are mounted both as plan-view and cr9ss-sectional samples on the same TEM specimen grid allowing convenient examination in both views. Samples of Si_3N_4, Zr, Co and TiN/CN/TiN films deposited on Si, and He ion implanted Si prepared by this technique are shown to be s uitable for analysis in the TEM.