In-situ observation of oxidization process at the most upper surfaces by x-ray surface propagation waves

摘要

The characteristics and applicable studies of the x rays scattered and propagating near the most upper surface of the substrate under the total reflection condition are described. Since the peak energy of the x rays gives direct information on the electron density of the surface materials, some experiments have been first conducted to confirm this. Then, an in-situ observation of oxidization processes for evaporated Cu films has been also conducted under a UV irradiation and an acid vapor exposure, revealing that there exist several oxidizing stages in time variations, namely a slight increase in the electron density at the initial stage, subsequently an abrupt decrease, and then steady value suggesting the sealing-off mechanism in the oxidization phenomena.