Corrosion Fatigue Tests of Micro-Sized Specimens

摘要

Corrosion fatigue properties of micro-sized materials are extremely important to design MEMS devices and micro-machines used in corrosive environments. However, there have been few studies that investigate corrosion fatigue properties of micro-sized materials. Thus, it is necessary to develop a corrosion fatigue test method for micro-sized materials. However, there are several difficulties in corrosion fatigue tests on micro-sized specimens. It is also necessary to clarify the problems for the method and to find their solutions. In this investigation, a corrosion fatigue test method for micro-sized specimens has been developed and corrosion fatigue tests for micro-sized Ni-P amorphous alloy specimens have been carried out in a 0.9% NaCl solution. Specimens of cantilever-beam-type with dimensions of 10 X 12 X 50 μm~3 were prepared from a Ni-P amorphous thin film by focused ion beam machining. Corrosion fatigue tests on the micro-sized specimens were succeeded, and environmental effects on fatigue properties of micro-sized specimens were clearly observed. Several problems and solutions for the method were described.