The Effect of Line Box Configuration on Over ay Performance

摘要

In this report, the effect of line box configuration on overlay performance is investigated using different line box configurations (X-direction and Y-direction) by overlay data and SEM observation. Both overlay data from Nikon stepper and KLA machine are reported and analyzed to explore the likely root causes of misalignment. Overlay values in Y direction were all within specification however some overlay values in X directions were badly out of specifications, which might result from different line box configurations after CMP process from SEM results.