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On the quantification and improvement of the models for surface roughness

机译:关于表面粗糙度模型的量化和改进

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Predictability of transmission line parameters is very important for microelectronics packaging. Surface roughness can cause a drastic deviation in transmission line parameters from the ideal theoretically calculated values. State-of-the-art analytical and full-wave surface roughness models have been helpful in closing this gap but they have considerable limitations, especially when applied to certain types of thin-film structures. This work analyzes some state-of-the-art surface roughness models and quantifies their limitations. A new approach to surface roughness characterization is then presented.
机译:传输线参数的可预测性对于微电子封装非常重要。表面粗糙度可能会导致传输线参数与理想的理论计算值产生巨大偏差。最先进的分析和全波表面粗糙度模型有助于缩小这一差距,但它们有很大的局限性,尤其是在应用于某些类型的薄膜结构时。这项工作分析了一些最新的表面粗糙度模型并量化了它们的局限性。然后提出了一种新的表面粗糙度表征方法。

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