首页> 外文会议>Semiconductor Pure Water and Chemicals(SPWCC) >The Application of Electrochemical Regenerated Ion Exchange (ERIX™ ) Technologies To Wastewater Recycle, Mixed Acid Wastes and Plating Bath Rinses
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The Application of Electrochemical Regenerated Ion Exchange (ERIX™ ) Technologies To Wastewater Recycle, Mixed Acid Wastes and Plating Bath Rinses

机译:电化学再生离子交换(ERIX™)技术在废水回收,混合酸废料和电镀槽漂洗中的应用

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Electrochemically regenerated ion exchange (ERIX™) concentrates chemical waste and recovers water for reuse. ERIX incorporates proven electrodeionization (EDI) technology, ion exchange and electrodialysis in a single cell. EDI and ion exchange are used commercially to produce ultra-pure water. In EDI cells, the mixed-bed ion exchange deionizes the solution as it passes through. The electrodialytic components move the ions from the resin to a concentrate stream, thereby achieving a continuous ion exchange process without the need for periodic regeneration of the cell or addition of regenerant chemicals. ERIX can be used for the removal of both cations and anions. This paper describes ERIX applications for acid waste and copper rinse wastewater treatment. Wet cleaning benches frequently discharge dilute acidic water to an acid waste neutralization plant (AWN). Anion ERIX can recover the deionized water from this waste stream reducing the hazardous waste volume. Electroplating is used to deposit copper in semiconductor chip and packaging applications. This procedure generates a dilute acidic copper rinse waste. Copper can be removed from wastewater with cation ERIX™ to meet metal discharge limits for standard AWN treatment systems.
机译:电化学再生离子交换(ERIX™)浓缩化学废料并回收水以供重复使用。 ERIX在单个电池中整合了成熟的电去离子(EDI)技术,离子交换和电渗析技术。 EDI和离子交换在商业上用于生产超纯水。在EDI电池中,混合床离子交换在溶液通过时使溶液去离子。电渗析组分将离子从树脂移至浓缩物流,从而实现了连续的离子交换过程,而无需定期再生电池或添加再生化学物质。 ERIX可用于去除阳离子和阴离子。本文介绍了ERIX在酸性废料和铜冲洗废水处理中的应用。湿式清洁台经常将稀酸性水排放到酸废中和装置(AWN)中。阴离子ERIX可以从该废物流中回收去离子水,从而减少了危险废物量。电镀用于在半导体芯片和封装应用中沉积铜。此过程会产生稀酸性铜冲洗废物。可以使用阳离子ERIX™从废水中去除铜,以满足标准AWN处理系统的金属排放限制。

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