Processing Technology of Ultra-thin Crystal Components

摘要

With the Advancement of information industry, crystal materials have been widely applied in optical technology, electronic industry, high energy physics, etc. For high performance of optical devices, crystal wafer, the key element of optical-electric devices, has been demanded of high accuracy, super-smooth and undamaged crystal surface. It is very important to study and develop the key processing technology of ultra-thin crystal components. In this paper, the latest developments of the processing technology of several typical ultra-thin crystal components are discussed.