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Electron-Phonon Scattering Effect on Strained Si Nanowire FETs at Low Temperature

机译:低温下应变硅纳米线FET的电子声子散射效应

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Strained Si nanowire FETs of nanowire width (W) of W=155nm and W=5000nm, are evaluated by I_d-V_(bg) characteristics at various temperatures. Transconductance (g_m) and subthreshold slope are obtained from the I_d-V_(bg) characteristics. The normalized g_m (g_m~*) increases by a factor of 1.38 for W=155nm and 3.13 for W=5000nm. Subthreshold slope decreases 22% for W=5000nm and 42% for W=155nm. This improvement is due to suppression of electron-phonon scattering at low temperature. This also indicates that the influence of electron-phonon interaction on g_m enhancement is different compared to that in bulk Si.
机译:通过I_d-V_(bg)特性在各种温度下评估纳米线宽度(W)为W = 155nm和W = 5000nm的应变Si纳米线FET。从I_d-V_(bg)特性获得跨导(g_m)和亚阈值斜率。对于W = 155nm,归一化的g_m(g_m〜*)增加1.38倍,而对于W = 5000nm,归一化的g_m增加3.13倍。对于W = 5000nm,亚阈值斜率降低22%,对于W = 155nm,亚阈值斜率降低42%。该改善是由于抑制了低温下的电子-声子散射。这也表明,电子-声子相互作用对g_m增强的影响与块状Si中的影响不同。

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    Faculty of Science and Engineering, Waseda University 3-4-1 Ohkubo, Shinjuku, Tokyo 169-8555, Japan;

    Faculty of Science and Engineering, Waseda University 3-4-1 Ohkubo, Shinjuku, Tokyo 169-8555, Japan;

    Faculty of Science and Engineering, Waseda University 3-4-1 Ohkubo, Shinjuku, Tokyo 169-8555, Japan;

    School of Science and Technology, Meiji University 1-1-1 Higashimita, Tama, Kawasaki, 214-8571, Japan;

    School of Science and Technology, Meiji University 1-1-1 Higashimita, Tama, Kawasaki, 214-8571, Japan;

    School of Science and Technology, Meiji University 1-1-1 Higashimita, Tama, Kawasaki, 214-8571, Japan;

    Faculty of Science and Engineering, Waseda University 3-4-1 Ohkubo, Shinjuku, Tokyo 169-8555, Japan;

    Faculty of Science and Engineering, Waseda University 3-4-1 Ohkubo, Shinjuku, Tokyo 169-8555,;

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  • 中图分类 强性介质和压电介质;
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