A Wafer scale Active Pixel CMOS Image Sensor for generic X-ray radiology

摘要

This paper describes a CMOS Active Pixel Image Sensor developed for generic X-ray imaging systems using standard CMOS technology and an active pixel architecture featuring low noise and a high sensitivity. The image sensor has been manufactured in a standard 0.35 μm technology using 8" wafers. The resolution of the sensor is 3360×3348 pixels of 40×40 μm~2 each. The diagonal of the sensor measures little over 190 mm. The paper discusses the floor planning, stitching diagram, and the electro-optical performance of the sensor that has been developed.