Tela Innovations, Inc., 485 Alberto Way, Suite 115, Los Gatos, CA, USA 95032;
Tela Innovations, Inc., 485 Alberto Way, Suite 115, Los Gatos, CA, USA 95032;
Tokyo Electron, Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki City, Yamanashi, Japan 407-0192;
Sequoia Design Systems, Inc., 137 Chapman Rd., Woodside, CA USA 94062;
Canon, Inc., 20-2, Kiyohara-Kogyodanchi, Utsunomiya-shi, Tochigi, Japan 321-3292;
Tokyo Electron, Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki City, Yamanashi, Japan 407-0192;
Tokyo Electron, Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki City, Yamanashi, Japan 407-0192;
Low k_1; highly regular layout; gridded design rules; pitch division; spacer double patterning; lines and cuts; design source mask optimization (DSMO);
机译:基于光芳香化的两级光基间距刻版光刻机的设计与合成
机译:螺距分割光刻的“两阶段”光基发生器的合成与表征
机译:通过使用负性显影光刻和蚀刻光刻图案,实现具有自对准的56 nm节距的铜双大马士革互连
机译:具有4倍间距分裂和Smo-Lite的子12nm光学光刻
机译:使用数字视频投球模拟器来训练专业棒球击球手,以提高其检测光学预期投球信息的能力。
机译:纳米压印光刻对强小型化光谱仪的作用
机译:用于间距光刻的基于光致变形的两级光基发生器的设计与合成