Development of high-order segmented MEMS deformable mirrors

摘要

The areas of biological microscopy, ophthalmic research, and atmospheric turbulence correction require high-order DMs to obtain diffraction-limited images. Iris AO has been developing high-order MEMS DMs to address these requirements. Recent development has resulted in fully functional 489-actuator DMs capable of 9.5 μm stroke. For laser applications, the DMs were modified to make them compatible with high-reflectance dielectric coatings. Experimental results for the 489-actuator DMs with dielectric coatings shows they can be made with superb optical quality λ/93.3 rms (11.4 run rms) and λ/15.9 rms (20.3 tun rms) for 1064 nm and 1540 nm coatings. Laser testing has demonstrated 300 W/cm~2 power handling with off-the-shelf packaging. Power handling of 2800 W/cm2 is projected when incorporating packaging optimized for heat transfer.