Determining of Young#x2019;s modulus of multi-layered structure by SAWs method

机译：锯法测定杨氏结构的杨氏模量

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The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of thin film. The theoretical equations for describing SAWs propagating on the multi-layered structure ar

机译：表面声波（锯）技术正在成为一种有吸引力的工具，用于精确和无损地表征薄膜的力学性质。用于描述在多层结构AR上传播锯的理论方程

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来源
《International Conference on Microwave and Millimeter Wave Technology》|2008年||共4页
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作者
Xia Xiao; Xue-Yi You;
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中图分类 TN015-53;
关键词
Young''s modulus; dispersion (wave); multilayers; surface acoustic waves; thin films; titanium compounds; TiO-TiN; Young''s modulus; dispersion features; duplex film; elastic modulus; facile fitting process; mechanical property; multilayered structure; surface acousti;

机译：杨氏的模量;多层;表面声波;薄膜;钛化合物;Tio-tiN;幼吨的模量;色散特征;双面薄膜;弹性模量;弹性模量;机械性质;机械性质;机械性质;机械性质;机械性质;Multipled 结构;表面acousti;

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机译：确定多层结构中低k薄膜杨氏模量的声表面波方法的数值研究
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3. Optimal Design of Thickness and Young's Modulus of Multi-Layered Foldable Structure Considering Bending Stress, Neutral Plane and Delamination under 2.5 mm Radius of Curvature [J] . Chae Yunsik, Chae Gee Sung, Youn Yeo O., International Journal of Precision Engineering and Manufacturing . 2018,第8期

机译：考虑弯曲应力，中性平面和2.5mm曲率半径下的多层可折叠结构厚度和杨氏模量的最佳设计
4. Determining of Young#x2019;s modulus of multi-layered structure by SAWs method [C] . Xia Xiao, Xue-Yi You International Conference on Microwave and Millimeter Wave Technology . 2008

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机译：用于厚度测量和监视多层结构的声学方法。
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Determining of Young#x2019;s modulus of multi-layered structure by SAWs method

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