Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage

摘要

In this paper, the analysis of crosstalk error in an optical sensor head for a six degree-of-freedom (DOF) surface encoder is carried out. Since the crosstalk errors among the outputs from the sensor degrade the measurement uncertainty of the surface encoder, a further detailed analysis is required. In this paper, an intensive investigation on the crosstalk errors is carried out throughout some experiments.