Theoretical investigation on measurement range of a femtosecond laser chromatic confocal probe by utilizing side-lobe of axial response

摘要

In this paper, by moving and adjusting the collecting lens suitably, the main-lobe is moved to the position where gap between main-lobe and side-lobe is located, aimed at solving the problem of discontinuous measurement range. So that the side-lobe of the axial response can be utilized for the purpose of extending the measurement range of the established chromatic confocal probe. Theoretical analysis and numerical simulation are carried out for computing the measurement range of the chromatic confocal probe.