Measurement and uncertainty analysis of a precision V-shaped ceramic part

摘要

This paper presents measurement of a precision ceramic part having V-shaped surfaces to be measured. Machining of a ceramic part is attracting attentions due to the superior characteristics such as a low thermal expansion coefficient or a high stiffness when being employed in fabrication equipments. Meanwhile, due to the difficulty of machining ceramic part, in general, it is necessary to carry out compensation machining with off-machine measurement. In this paper, aiming to establish a method to evaluate the uncertainty of measurement of an angle between two surfaces in a ceramic part, computer simulation based on the Monte-Carlo method is carried out, while employing data obtained from the measurement carried out by using a commercially available coordinate measuring machine (CMM).