(Invited) Development of Pulse-Heated Diaphragm Type MEMS Gas Sensors for Indoor Air Quality Measurement

摘要

Amid growing concern about indoor air quality (IAQ), MOS type gas sensors for the detection of volatile organic compounds (VOC) are widely used in household appliances such as air purifiers for on-demand control of the appliances depending on VOC concentration in surrounding air. There are also potential demands for gas sensors to be used for mobile applications, with which people can monitor environmental conditions in dwelling or workplaces. However, detection accuracy, power consumption and cost of conventional MOS type gas sensors have not yet reached the level generally required for VOC concentration monitoring by mobile applications. To solve these issues, we have developed a new diaphragm type MEMS gas sensor, and studied their appropriate pulsed heating conditions. This optimized MEMS sensor chip was integrated with an ASIC with built-in temperature and humidity sensors in a SMD package, and its practical performance and mechanical durability were evaluated.