Preliminary Study into Purifying Air-conditioning System in Cleanrooms for TFT-LCD

摘要

(1) The development of information technology has promoted the development of various new flat-plate display devices represented by LCD devices. The 21st century will be the era for significant development of new flat-plate display technology. (2) Fresh air in a TFT-LCD cleanroom fab is centrally handled while MAU+FFU+DC (FCU) system is used for air supply. (3) To design the purification air-conditioning system in a TFT-LCD cleanroom fab, the cold/heat sources should be rationally selected and temperature/humidity and air cleanliness accurately trconolled depending on the particular conditions of a project. In particular, attention should be directed to the design for the control of the FFU noise.