PROBLEM TO BE SOLVED: To provide an air-conditioning system for a cleanroom, to enable control of temperature to optimum values corresponding to thermal loads in respective places in a cleanroom.;SOLUTION: In the clean room 55 that air flowing in a supply flow passage 53 flows in a vertical laminar flow in a room through a fan filter unit 54 and flows out to a return air passage 57 through an indoor perforated floor 56, and air is circulated from the return air passage 57 to the supply passage 53. A plurality of control zones Z1, Z2, Z3, and Z4 are set in the space to be controlled of the cleanroom 55 and a plurality of dry coil units 71 with a fan, situated on the ceiling surface of the supply passage 53 are situated at positions corresponding to the control zones Z1, Z2, Z3, and Z4. Thermal loads differed classified by each zone are processed by the dry coil units 71 with a fan.;COPYRIGHT: (C)2002,JPO
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