Creation of relief coatings on the surface of silicate materials in the plasma of radio-frequency induction discharge at low pressure

摘要

The paper shows the possibility to create relief coatings based on powdered nonmetallic materials (SiO_2 and Al_2O_3) on a silicate substrate in the radio-frequency induction plasma at the low pressure. The features of the structure and properties of the obtained coatings have been studied.