Antimonide-based Visible to Short Wavelength Infrared Bispectral Photodetector

摘要

We report cylinder photon traps, prism photon traps, and SiO2/Ta2O5 antireflection films added to the active areas ofshort wavelength infrared detectors. The total device thickness was estimated ~3.3μm and with the p-i-n structure basedon antimonide. The simulation results show that the photon traps increase the absorption of the invisible spectrum distinctly.Also, the optical measurements reveal that maximal responsivity of the detector with PTs array is 0.094A/W in the visiblerange and 0.64A/W in the short wavelength infrared spectrum. The responsivity in the wavelength of short-wave infraredcan be increased apparently as well. Thus, the photon traps array may a potential method for antimonide-based visible toshort wavelength infrared bispectral photodetector.