A Novel Equivalent Circuit Approach for Modal Analysis of MEMS Cantilever Beam

摘要

This chapter presents a novel equivalent circuit modeling approach for the modal analysis of a MEMS cantilever beam. The modal solution is implemented in the circuit model, which provides the spatial displacement in steady-state and dynamic conditions. The sinusoidal excitation is employed to study the transient solution of mode shapes. As a test case, the steady-state displacement along the length of 40 urn cantilever is determined under different modes and compared with the results obtained by MATLAB simulation, which indicates a good agreement.