Fabrication of self-cleaning antireflection films with plasma polymer fluorocarbon/inorganic multilayer using pilot scale roll-to-roll sputter - (ppt)

摘要

· A self-cleaning AR quadrilayered thin films with a large area were easily fabricated by continuous roll-to-roll sputtering process and MF power sources · Plasma polymer fluorocarbon with low refractive index and low surface energy was applied as the top layer for the first time · The reflectance of AR film was reduced to 1.71% in the visible region · The AR film showed water-repellent surface above 100° of water contact angle · The AR effect of the fabricated films was confirmed through fluorescent lamp test and performance test of perovskite solar cells