Numerical Analysis and Optimization of Internal Flow Field in Optical Module of DUV Laser

摘要

In this paper, the internal flow field in an optical module of DUV laser was analyzed by ANSYS Fluent based on the finite volume method. The way of purging nitrogen was optimized according to the results of the analysis. After the optimization, a better nitrogen purge method was obtained, and a flow field with uniform velocity and low turbulence energy was obtained on the laser transmission path. The results of this paper can provide a reference for the design of the gas purge system of DUV laser.