A Stewart platform with piezoelectric actuators is presented for micro-vibration isolation. The Jacobian matrix of the Stewart platform, which reveals the relationship between the position/pointing of the payload and the extensions of the struts, is derived by the kinematic analysis and modified according to measured FRFs (frequency response function). The dynamic model of the Stewart platform is established by the FRF synthesis method to accommodate flexible modes of the platform. In active isolation, the LMS-based adaptive method is adopted and combined with the Jacobian matrix to suppress pure vibrations of the payload. Numerical simulations and experiments were conducted to prove vibration isolation performance of the Stewart platform subjected to periodical disturbances, and the results have demonstrated that considerable attenuations can be achieved.
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