Innovations in PWM Drive Technology for Nanometer Level Motion Control Applications - (PPT)

摘要

An increasing number of applications require nanometer level positioning. PWM drives: Industry Standard, Weil-Known; Certain constraints limit use for nm-level applications Linear drives; Have long served high-end motion control niche; Suffer from fundamental limitations, ultimately resulting in relatively high cost NanoPWM; Revolutionary new technology, combines benefits of PWM and Linear drives; Achievable performance is second to none.