For Taiwan Photon Source in NSRRC, an in-vacuum undulator (IU) will be set in a straight section. The baking test took place in NSRRC, using heating wires, tape heaters, a hot water unit and so on. The heating wires were welded onto the external wall of the stainless-steel chamber. The tape heaters were used for the sites without heating wires. After the acceptance test, we assembled the residual gas analyzer (RGA) and extractor gauge in the IU. The pumping curve and RGA spectrum were recorded and investigated. The slope of the pumping curve near 1 h was -0.99. When the temperature gradually increased to about 180°C, the pressure was about 8.7×10~(-5) Torr. Most of the gas source is water before baking. After the baking test, the major residual gases include H_2, CH_4, H_2O, CO and CO_2. We analyzed the RGA spectrum during the baking and discuss the results in this paper.
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