Development of a Nano-Scale Micro-Machining Machine

摘要

This paper proposes a novel nano-scale micro-machining machine based on the pantograph mechanism. It is designed to satisfy the need for achieving high accuracy and process efficiency in the manufacture of increasingly small industrial products. The target platform is mounted on a pantograph and small x-y sliders, and is driven by a traditional X-Y platform with common precision. The theoretical and simulation results indicate that the proposed method is feasible for development of a micro-machining machine capable of achieving nano-level precision. In addition, test results indicate that the micro-machining machine can position the target platform with a resolution of 500nm.