Study on properties and preparation of films by Unbalanced Magnetron Sputtering

摘要

TiAlN films were prepared by closed field Unbalanced Magnetron Sputtering ion plating. EDS, XRD and SEM were used to test the films' chemical composition, microstructure and surface morphology. In addition, the films' surface microhardness, bonding strength and friction coefficient were also determined. The experimental results indicate that the TiAlN films of different substrate hardness have dense film structure and the same chemical composition, the hard substrate microhardness of the film can reach 2575 HV_(0.025) and soft substrate can be up to 2295 HV_(0.025), the bonding strength of which is respectively 59N and 56N, Friction coefficient is 0.45 and 0.5.