Development and Experiment of ESD Simulator Console

摘要

This paper put forwards the overall design idea and scheme for ESD simulator console, which conducts analysis on the two key technologies of motion control system, i.e. control motor and programmable control. In this paper, test comparison regarding the experiment of repeatability of air discharge current wave form of ESD simulator has been conducted. The results indicated that repeatability of air discharge current wave forms has been improved to some extent.