Analysis of The Surface Shape Effect on Optical Homogeneity Measurement of Large Calibre Optical Materials

摘要

Optical homogeneity of the optical materials directly affects the wavefront quality of the refractive optical system. As the traditional direct measurement method requires high precision surface shape machining for optical material(PV value < 0.1 λ,), it was gradually replaced by the method of Fizeau interferometer four step, which requires lower surface shape. This article used 600mm diameter Fizeau interferometer, a four step method tested the optical homogeneity of the same 500 mm diameter fused quartz material with a front surface shape respectively 3.719 λ, and 0.427 λ (λ = 632.8nm). Comparison of the test results showed that the PV difference of optical homogeneity between the two was only 0.036 λ, Δn inaccuracy was 10~(-7), and the homogeneity morphology matched exactly. To further analyze the factors affecting the optical homogeneity, the front surface shape of the other sample was sliced in a predetermined direction. This artical analyzed the effect of morphology upon the slicing line on optical homogeneity. The conclusion was that the direct affecting factor on optical homogeneity was the slope of surface morphology, rather than the overall PV value.