Development an Ontology of Microelectromechanical Systems (MEMS) and Nano-electromechanical Systems (NEMS)

机译：开发微机电系统（MEMS）和纳米机电系统（NEMS）的本体

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In this paper the process of development a OntoMEMS ontology of Microelectromechanical Systems (MEMS) and Nano-electromechanical Systems (NEMS) are present.

机译：本文在开发微机电系统（MEMS）和纳米机电系统（NEMS）的ontomems本体的过程。

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《International Conference on Perspective Technologies and Methods in Micro-electromechanical Systems Design》|2010年||共1页
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作者
Andriy Romanyuk;
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中图分类 T-53;
关键词
MEMS; NEMS; Ontology; Domain ontology; Upper level ontology;

机译：MEMS;NEMS;本体;域本体;上层本体;

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2. Developments in Microelectromechanical Systems (MEMS): A Manufacturing Perspective [J] . Srinivas A. Tadigadapa, Nader Najafi Journal of manufacturing science and engineering: Transactions of the ASME . 2003,第4期

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3. Multi-response optimization of ultrathin poly-SiGe films characteristics for Nano-ElectroMechanical Systems (NEMS) using the grey-Taguchi technique [J] . T.B. Asafa, G. Bryce, S. Severi, Microelectronic Engineering . 2013,第nova期

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4. Development an ontology of Microelectromechanical Systems (MEMS) and nano-electromechanical systems (NEMS) [C] . Romanyuk Andriy 2010 Proceedings of 6th International Conference on Perspective Technologies and Methods in MEMS Design . 2010

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5. Multi-scale Simulation Development and Microscopic Contact Physics in Ohmic RF Microelectromechanical Systems (MEMS) Switches. [D] . Ji, Xiaoyin. 2015

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6. In Vivo Assessment of Bone Graft/Endplate Contact Pressure in a Caprine Interbody Pseudarthrosis Model: A Preliminary Biomechanical Characterization of the Fusion Process for the Development of a Microelectromechanical Systems (MEMS) Biosensor [O] . Lisa A. Ferrara, Ilya Gordon, Richard Schlenk, 2008

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7. Quasi electrical contact behaviors of metal micro-contacts for micro/nano-electromechanical systems (MEMS/NEMS) [O] . Haodong Qiu -1

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8. Microelectromechanical Systems (MEMS) and Solder Self-Assembly for 3-D MEMS and MEMS Arrays. [R] . 2001

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Development an Ontology of Microelectromechanical Systems (MEMS) and Nano-electromechanical Systems (NEMS)

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