Error-compensating phase-shifting Fizeau interferometry with a wavelength-tunable laser diode

摘要

A newly developed 16-step phase-shifting Fizeau interferometry acts to eliminate the multiple-beam interference noise, the measurement errors due to the LD power variations and the setup misalignment in an object surface. A convex-to-flat depth in a cylindrical lens is less than an allowable misalignment length so that a surface profile measurement demonstrates without phase error.