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Electrical properties of Titanium dioxide Nanoparticle on Microelectrode: Gap Size Effect

机译:二氧化钛纳米粒子对微电极的电气性能:间隙尺寸效应

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TiO_2 nanoparticle based interdigitated microelectrode was fabricated by spin-coating and conventional photolithography approaches. Aluminum metal was deposited by thermal evaporator on silicon dioxide substrate. The effect of aluminum microelectrode gap sizes (4, 5 and 6 μm) on the electrical performance was investigated using picoammeter. Extremely small output current values of three different gap sizes were acquired. A characteristic electrical behavior was observed for the studied geometry. The configuration demonstrated a reduction in the output current from 2.28E-10,1.32E-9 and 2.38E-9 A with increasing gap size.
机译:通过旋涂和常规的光刻方法制造TiO_2基于纳米颗粒的纳米粒子的互分子微电极。通过二氧化硅基材上的热蒸发器沉积铝金属。使用Picoamber研究了铝微电极间隙尺寸(4,5和6μm)对电性能的影响。获取极小的输出电流三种不同间隙尺寸的电流值。对于研究的几何形状,观察到特征电动行为。该配置表明,从2.28E-10,1.32E-9和2.38E-9A的输出电流降低,随着间隙尺寸的增加。

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