Reference-free In-Depth Characterization Of Nanoscale Layer Systems Using A Combined Grazing Incidence X-ray Fluorescence And X-ray Reflectometry Approach

摘要

The accurate in-depth characterization of nanoscale layered systems is an essential topic for today's development in many fields of materials research. Especially nanolaminates, which are a stack of multiple thin layers, are technologically relevant for current and future electronic devices and other applications [1,2]. However, the metrological challenges to sufficiently characterize such systems with respect to their in-depth elemental distributions require a further development of the current analytical techniques.