RESEARCH OF NANOMETER PRECISION POSITIONING STAGE WITHOUT FEEDBACK CONTROL

摘要

To adapt the miniaturized development tendency of nanometer positioning devices, a new type of two-dimensional micro-displacement stage which can implement nanometer-level ultra-precision positioning without feedback control is designed. The designed micro-displacement stage takes a group of piezoelectric ceramic actuators(PZTAs) connected in series as actuator unit, takes flexure plates as elastic guide rail. To overcome the non-linearity and the hysteresis of PZTAs, binary actuation principle is adopted to control a group of binary actuators that work together to output many discrete, repeatable displacements. If these displacements are distributed within a scope of a few microns, only simple on and off actuator commands may be used to obtain nanometer-level repeatable positioning without feedback control. Theoretical design and finite element analysis(FEA) are used to design the new type flexure plate and the whole stage. The expressions of rigidity, force and displacement are obtained by theoretical calculation. Finite element analysis verified the rationality and the feasibility of the stage.