OOPIC Simulation of a Cylindrical Magnetron Glow Discharge

摘要

An Object Oriented Particle-in-Cell model of a plasma glow discharge in a cylindrical magnetron cleaning device has been developed to provide guidance in developing a novel in situ surface conditioning technique. The model tracks the trajectories of particles by solving the equations of motion and the electrostatic field equations. Simulation results are compared to experimental measurements obtained from a plasma probe at various axial positions along the substrate surface.