deformation; electro-optical modulation; light interferometry; liquid crystal on silicon; micro-optomechanical devices; microactuators; micromachining; optical testing; piezoelectric actuators; spatial light modulators; stroboscopes; vibrations; MEMS structure testing; MOEMS devices; actuated MEMS; amplitude distributions; dynamic deformation effects; interferometric measurements; liquid crystal on silicon element; micromachining process control; microstructure shape; piezoelectrically driven silicon microactuators; resonance frequencies; spatial modulator; static characterization; stroboscopic interferometry; vibration modes; wavefront correction;
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