Microcuvette for integration with infrared spectrometer for biofluid analysis

摘要

A micro-spectrometer for Infrared spectroscopy applications has been designed and fabricated. The principle component of the microspectrometer is a micromachined Fabry-Perot interferometer (FPI), which is used as a wavelength selector. This is integrated with a fluidic sampling system (microcuvette), an emitter, and a detector to form a completely functional micro-spectrometer. The intended applications of the device are for spectroscopic study of biochemical samples, as a sensing component by integration with modular microsystems like microreactors for a "Lab-On-Chip" application, and as an implantable biosensor for analysis of intravascular fluids like glucose, proteins, and hormones. Such an application requires a miniaturized fluidic sampling system for handling sample fluids. The microcuvette is fabricated using silicon micromachining and is packaged with fluidic interconnections and is integrated with the FPI at the chip level. Optical characterization of the standalone microcuvette was performed with a FTIR spectrometer for various aqueous samples and the initial results support the feasibility of developing a miniaturized fluid handling system.