A Methodology for System Level Simulation, Modeling and Optimization of MEMS Devices Categories: Co-simulation and Optimization System, Multi-level Modeling

摘要

VLSI systems designers can begin their design process with a behavioral description of a system, then proceed to system simulation, optimization, netlist generation, and physical design. MEMS designers typically begin with device design, this process is often followed by several fabrication iterations for device characterization, and the rest of the system-the electronics and packaging-are layered on top of the device in successive design iterations. This methodology results in long design cycles and is very costly. A more structured approach to MEMS CAD would permit the designer to specify system level performance goals and then propagate those goals down to a synthesis tool that generates physical layout for the devices.