首页> 外文会议>Conference on Optical Metrology and Inspection for Industrial Applications >Large-area, uniform light field generated using a galvo scanning system for bi-directional reflectance distribution function measurement
【24h】

Large-area, uniform light field generated using a galvo scanning system for bi-directional reflectance distribution function measurement

机译:使用Galvo扫描系统产生大面积,均匀的光场,用于双向反射率分布函数测量

获取原文

摘要

The wavelength range of a femtosecond laser system can be extended to cover 190 nm ~ 4000 nm via optical parametric oscillation and various harmonic generation processes starting from a Ti:Sapphire mode-locked femtosecond pulsed laser. The laser beams can be well adjusted to be coupled to a galvo scanning system to generate a large-area, uniform light field which is highly suitable for the bi-directional reflectance distribution function (BRDF) measurement of the surface of a large-size objective. The scanning route was carefully designed with a few sub-cycles to provide the same illumination time over different spots on the measurement surface. The irradiance of the light field @ 532 nm was measured using a silicon photodiode with an integration time in the range of 0.1 s ~ 10 s and the non-uniformity was measured to be < 4% over a 60 mm × 60 mm area. The integration time of the radiance sensor for the BRDF measurement sensor was adjusted in the range of 0.1 s ~ 10 s, as well, and the BRDF of a 60 mm × 60 mm surface can be achieved with a standard uncertainty of 5%.
机译:通过光学参数振荡和从Ti开始的各种谐波发电过程可以扩展到飞秒激光系统的波长范围以覆盖190nm〜4000nm:蓝宝石模式锁定的飞秒脉冲激光器。可以很好地调节激光束以耦合到GALVO扫描系统,以产生大面积均匀的光场,这对于大尺寸物镜的表面的双向反射率分布功能(BRDF)测量非常适合。扫描路线仔细设计,具有几个子循环,以在测量表面上的不同斑点提供相同的照明时间。使用硅光电二极管测量光场@ 532nm的辐照度,其中一体化时间在0.1s〜10 s的范围内,并且测量不均匀性为60mm×60mm区域的<4%。 BRDF测量传感器的辐射传感器的积分时间在0.1S〜10 s的范围内调节,并且可以通过5%的标准不确定性实现60mm×60mm表面的BRDF。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号