Development Of Long-Lived Thick Carbon Stripper Foils For High Energy Heavy Ion Accelerators By A Heavy Ion Beam Sputtering Method

摘要

In the past decade, we have developed extremely long-lived carbon stripper foils of 1-50 μg/cm~2 thickness prepared by a heavy ion beam sputtering method. These foils were mainly used for low energy heavy ion beams. Recently, high energy negative Hydrogen and heavy ion accelerators have started to use carbon stripper foils of over 100 μg/cm~2 in thickness. However, the heavy ion beam sputtering method was unsuccessful in production of foils thicker than about 50 μg/cm~2 because of the collapse of carbon particle build-up from substrates during the sputtering process. The reproduction probability of the foils was less than 25%, and most of them had surface defects. However, these defects were successfully eliminated by introducing higher beam energies of sputtering ions and a substrate heater during the sputtering process. In this report we describe a highly reproducible method for making thick carbon stripper foils by a heavy ion beam sputtering with a Krypton ion beam.