Flow and Dynamic Characteristics between FPD and Contact-free Handler Nozzles

摘要

The purpose of this paper is to investigate fluid characteristics and flat panel display behaviours on contact-free flat panel display handler nozzles. Since air force distributions streaming bottom surface of a flat panel display highly dependent on operating as well as design conditions and configuration of contact-free handler nozzle, influences of various parameters such as flow rate, supply air pressure, floating height are examined through a series of computational fluid dynamics analyses. Moreover, dynamic finite element analyses of the flat panel display are carried out to assure that an oscillation effect caused by disturbances is not significant. Key findings from the both computational fluid dynamics and structural integrity analysis results are presented and discussed, which can be figured out an optimized operating condition of contact-free handler nozzles.