DESIGN AND FABRICATION OF INTEGRATED MICRO AMMONIA ANALYSIS SYSTEM (IMAAS) WITH MICRO REACTOR AND IN-PLANE TYPE OPTICAL DETECTOR USING BERTHELOT REACTION AND MICRO FLUIDIC DEVICES

摘要

Integrated micro ammonia analysis systems (IMAAS) with micro reactor and in-plane type optical detector using Berthelot reaction and micro fluidic devices were newly proposed and investigated. IMAAS with the size of 5 cm by 5 cm and thickness of 1 mm were fabricated using MEMS processes. IMAAS were packaged with inlet and outlet tube, and optical fiber connected with in-plane type optical source and optical detector using UV epoxy bonding. Reaction rates from ammonia to indophenols at IMAAS were increased with temperatures. In case of reaction temperature of 318K, reaction time was less than 1 min. From these results, fabricated IMAAS were reproducible and suitable for ammonia analysis. For the future works, it was thought these micro systems could be used for other micro reactions for versatile species analyses as well as detections for N-containing organic species including ammonia.